Preliminary Study on the Design of a Silicon Bio-inspired MEMS Gyroscope (U-SP-2-I-ICT)

Yue chen, DHB Wicaksono, L Zhang, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006
EditorsPJ French, K de Meyer, W Krautschneider, J Schmitz, LK Nanver, MCM van de Sande
Place of PublicationVeldhoven, The Netherlands.
PublisherSAFE
Pages379-383
Number of pages5
ISBN (Print)90-73461-44-8
Publication statusPublished - 2006
Event9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, Veldhoven, The Netherlands - Veldhoven, The Netherlands.
Duration: 23 Nov 200624 Nov 2006

Publication series

Name
PublisherSAFE

Conference

Conference9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, Veldhoven, The Netherlands
Period23/11/0624/11/06

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • Conf.proc. > 3 pag

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