Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

D Ugur, A Storm, R Verberk, JC Brouwer, WG Sloof

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)1-6
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
    Issue number3
    Publication statusPublished - 2012


    • CWTS JFIS < 0.75

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