Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

Shaogang Wang, Qihang Zong, Huiru Yang, Chunjian Tan, Qianming Huang, Xu Liu, Guoqi Zhang, Paddy French, Huaiyu Ye*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
27 Downloads (Pure)

Abstract

The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods remains a significant challenge. In this study, we introduce a laser pyrolysis direct writing technology that enables rapid and efficient fabrication of high-performance flexible pressure sensors with a micro-truncated pyramid array. The pressure sensor demonstrates exceptional sensitivities, with the values of 3132.0, 322.5, and 27.8 kPa-1 in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10 kPa, respectively. Furthermore, the sensor exhibits rapid response times (loading: 22 ms, unloading: 18 ms) and exceptional reliability, enduring over 3000 pressure loading and unloading cycles. Moreover, the pressure sensor can be easily integrated into a sensor array for spatial pressure distribution detection. The laser pyrolysis direct writing technology introduced in this study presents a highly efficient and promising approach to designing and fabricating high-performance flexible pressure sensors utilizing micro-structured polymer substrates.

Original languageEnglish
Pages (from-to)41055-41066
Number of pages12
JournalACS Applied Materials and Interfaces
Volume15
Issue number34
DOIs
Publication statusPublished - 2023

Keywords

  • continuous laser pyrolysis
  • flexible pressure sensor
  • laser direct writing
  • micro-truncated pyramid
  • PDMS
  • UV laser

Fingerprint

Dive into the research topics of 'Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing'. Together they form a unique fingerprint.

Cite this