Relative humidity sensors based on porous polysilicon and porous silicon carbide

E Connolly, PJ French, TMH Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

9 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SeSens 2002
Place of PublicationUtrecht
PublisherSTW Stichting voor de Technische Wetenschappen
Pages603-607
Number of pages5
ISBN (Print)90-73461-33-2
Publication statusPublished - 2002
EventSeSens 2002 SAFE2002 ProRISC 2002 - Utrecht
Duration: 29 Nov 200229 Nov 2002

Publication series

Name
PublisherSTW Stichting voor de Technische Wetenschappen

Conference

ConferenceSeSens 2002 SAFE2002 ProRISC 2002
Period29/11/0229/11/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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