Reliability issues on MEMS resonators

R Kazinczi, JR Mollinger, A Bossche

Research output: Book/Report › Report › Professional

Original languageUndefined/Unknown
Place of PublicationS.l.
Publishers.n.
Number of pages9
Publication statusPublished - 2001

Publication series

Name
PublisherS.n.

Bibliographical note

DEL.3780

Keywords

  • ZX Int.klas.verslagjaar < 2002

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