TY - JOUR
T1 - Resolution Limits of Resonant Sensors
AU - Manzaneque, Tomás
AU - Ghatkesar, Murali K.
AU - Alijani, Farbod
AU - Xu, Minxing
AU - Norte, Richard A.
AU - Steeneken, Peter G.
PY - 2023
Y1 - 2023
N2 - Resonant sensors hold great promise in measuring small masses, to enable future mass spectrometers, and small forces in applications like atomic and magnetic force microscopy. During the last decades, scaling down the size of resonators has led to huge enhancements in sensing resolution, but has also raised the question of what the ultimate limit is. Current knowledge suggests that this limit is reached when a resonator oscillates at the maximum amplitude for which its response is predominantly linear. We present experimental evidence that it is possible to obtain better resolutions by oscillation amplitudes beyond the onset of nonlinearities. An analytical model is developed that explains the observations and unravels the relation between ultimate sensing resolution and speed. In the high-speed limit, we find that the ultimate resolution of a resonator is improved when decreasing its damping. This conclusion contrasts with previous works, which proposed that lowering the damping does not affect or even harms the ultimate sensing resolution.
AB - Resonant sensors hold great promise in measuring small masses, to enable future mass spectrometers, and small forces in applications like atomic and magnetic force microscopy. During the last decades, scaling down the size of resonators has led to huge enhancements in sensing resolution, but has also raised the question of what the ultimate limit is. Current knowledge suggests that this limit is reached when a resonator oscillates at the maximum amplitude for which its response is predominantly linear. We present experimental evidence that it is possible to obtain better resolutions by oscillation amplitudes beyond the onset of nonlinearities. An analytical model is developed that explains the observations and unravels the relation between ultimate sensing resolution and speed. In the high-speed limit, we find that the ultimate resolution of a resonator is improved when decreasing its damping. This conclusion contrasts with previous works, which proposed that lowering the damping does not affect or even harms the ultimate sensing resolution.
UR - http://www.scopus.com/inward/record.url?scp=85161228746&partnerID=8YFLogxK
U2 - 10.1103/PhysRevApplied.19.054074
DO - 10.1103/PhysRevApplied.19.054074
M3 - Article
AN - SCOPUS:85161228746
VL - 19
JO - Physical Review Applied
JF - Physical Review Applied
SN - 2331-7019
IS - 5
M1 - 054074
ER -