Robust Fabrication method for silicon nanowire field effect transistors for sensing applications

M Mescher, LCPM de Smet, EJR Sudholter, JH Klootwijk

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)5649-5653
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Volume13
Publication statusPublished - 2013

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