Rounding of wafer - hole corners in -oriented silicon wafer by anisotropic etching

VG Kiutchoukov, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationElectronics '99
Place of PublicationSofia
PublisherTechnical University Sofia
Pages102-106
Number of pages5
ISBN (Print)954-438-260-7
Publication statusPublished - 1999
Event8th National Scientific and Applied Science Conference, Sofia - Sofia
Duration: 23 Sep 199925 Sep 1999

Publication series

Name
PublisherTechnical University Sofia

Conference

Conference8th National Scientific and Applied Science Conference, Sofia
Period23/09/9925/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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