Rounding of wafer - hole corners in -oriented silicon wafer by anisotropic etching

VG Kiutchoukov, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Electronics '99
Place of Publication	Sofia
Publisher	Technical University Sofia
Pages	102-106
Number of pages	5
ISBN (Print)	954-438-260-7
Publication status	Published - 1999
Event	8th National Scientific and Applied Science Conference, Sofia - Sofia Duration: 23 Sept 1999 → 25 Sept 1999

Name
Publisher	Technical University Sofia

Conference	8th National Scientific and Applied Science Conference, Sofia
Period	23/09/99 → 25/09/99

Keywords

@inproceedings{350761b040af451fb866bf37eb2166df,

title = "Rounding of wafer - hole corners in -oriented silicon wafer by anisotropic etching",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "VG Kiutchoukov and JR Mollinger and A Bossche",

year = "1999",

language = "Undefined/Unknown",

isbn = "954-438-260-7",

publisher = "Technical University Sofia",

pages = "102--106",

booktitle = "Electronics '99",

note = "8th National Scientific and Applied Science Conference, Sofia ; Conference date: 23-09-1999 Through 25-09-1999",

}

TY - GEN

T1 - Rounding of wafer - hole corners in -oriented silicon wafer by anisotropic etching

AU - Kiutchoukov, VG

AU - Mollinger, JR

AU - Bossche, A

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 954-438-260-7

SP - 102

EP - 106

BT - Electronics '99

PB - Technical University Sofia

CY - Sofia

T2 - 8th National Scientific and Applied Science Conference, Sofia

Y2 - 23 September 1999 through 25 September 1999

ER -