Saddle point in the merit function landscape of lithographic objectives

OE Marinescu, F Bociort, JJM Braat

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	221-228
Number of pages	8
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5962
Publication status	Published - 2005

Keywords

@article{355237e6d8f3417ba8eecbccc84ff300,

title = "Saddle point in the merit function landscape of lithographic objectives",

keywords = "conference contrib. refereed, Peer-lijst tijdschrift",

author = "OE Marinescu and F Bociort and JJM Braat",

year = "2005",

language = "Undefined/Unknown",

volume = "5962",

pages = "221--228",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Saddle point in the merit function landscape of lithographic objectives

AU - Marinescu, OE

AU - Bociort, F

AU - Braat, JJM

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

UR - http://www.spie.org

M3 - Conference article

SN - 0277-786X

VL - 5962

SP - 221

EP - 228

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -