Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolurion in Si during 1 keV 60 degrees O2+ bombardment with oxygen flooding

ZX Jiang, PFA Alkemade

    Research output: Contribution to journalArticleScientificpeer-review

    50 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1971-1982
    Number of pages12
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number4
    Publication statusPublished - 1998

    Bibliographical note

    ISSn: 0734211X

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