| Original language | English |
|---|---|
| IPC | H01L, B82Y, G03F |
| Publication status | Published - 2021 |
Shadow walls for use in fabricating devices
A. Singh (Inventor), E. Memisevic (Inventor)
Research output: Patent
A. Singh (Inventor), E. Memisevic (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | H01L, B82Y, G03F |
| Publication status | Published - 2021 |