Sheet resistance measurement for process monitoring of 400 °c PureB deposition on Si

L Qi, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings - 2015 International Conference on Microelectronic Test Structures
Editors s.n.
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages169-174
Number of pages6
ISBN (Print)978-1-4799-8302-5
DOIs
Publication statusPublished - 2015
EventICMTS 2015, Tempe, AZ, USA - Piscataway, NJ, USA
Duration: 23 Mar 201526 Mar 2015

Publication series

Name
PublisherIEEE

Conference

ConferenceICMTS 2015, Tempe, AZ, USA
Period23/03/1526/03/15

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