Simulation and design of an optical accelerometer

V. Rochus; W. J. Westerveld; B. Figeys; X. Rottenberg; R. Jansen

doi:10.1109/EuroSimE.2019.8724569

Simulation and design of an optical accelerometer

V. Rochus, W. J. Westerveld, B. Figeys, X. Rottenberg, R. Jansen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

Abstract

This paper presents a new type of accelerometer, the Micro-Opto-Mechanical Accelerometer (MOMA). Micro-opto-mechanical pressure sensors and microphones demonstrated already the excellent sensitivity on a very large pressure range which is possible thanks to their photonic read-out (1Pa precision over kPa range). In this paper, we design in the same technology an optical accelerometer using analytical equations as well as Finite Element simulations. The model takes into account the mechanical deformation of the device, its effect on the elongation of the waveguide, and also includes the optical losses. Using the opto-mechanical model, an optimum design is obtained varying device dimensions and waveguide positions in order to increase the accelerometer sensitivity.

Original language	English
Title of host publication	2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019
Publisher	IEEE
ISBN (Electronic)	9781538680407
DOIs	https://doi.org/10.1109/EuroSimE.2019.8724569
Publication status	Published - 2019
Externally published	Yes
Event	20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019: 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Hannover, Germany Duration: 24 Mar 2019 → 27 Mar 2019 Conference number: 20th

Conference

Conference	20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019
Country/Territory	Germany
City	Hannover
Period	24/03/19 → 27/03/19

Access to Document

10.1109/EuroSimE.2019.8724569

Cite this

@inproceedings{5c3954ec59b043e8b1f4d18919379c43,

title = "Simulation and design of an optical accelerometer",

abstract = "This paper presents a new type of accelerometer, the Micro-Opto-Mechanical Accelerometer (MOMA). Micro-opto-mechanical pressure sensors and microphones demonstrated already the excellent sensitivity on a very large pressure range which is possible thanks to their photonic read-out (1Pa precision over kPa range). In this paper, we design in the same technology an optical accelerometer using analytical equations as well as Finite Element simulations. The model takes into account the mechanical deformation of the device, its effect on the elongation of the waveguide, and also includes the optical losses. Using the opto-mechanical model, an optimum design is obtained varying device dimensions and waveguide positions in order to increase the accelerometer sensitivity.",

author = "V. Rochus and Westerveld, {W. J.} and B. Figeys and X. Rottenberg and R. Jansen",

year = "2019",

doi = "10.1109/EuroSimE.2019.8724569",

language = "English",

booktitle = "2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019",

publisher = "IEEE",

address = "United States",

note = "20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019 : 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems ; Conference date: 24-03-2019 Through 27-03-2019",

}

Rochus, V, Westerveld, WJ, Figeys, B, Rottenberg, X & Jansen, R 2019, Simulation and design of an optical accelerometer. in 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019., 8724569, IEEE, 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019, Hannover, Germany, 24/03/19. https://doi.org/10.1109/EuroSimE.2019.8724569

Simulation and design of an optical accelerometer. / Rochus, V.; Westerveld, W. J.; Figeys, B. et al.
2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019. IEEE, 2019. 8724569.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Simulation and design of an optical accelerometer

AU - Rochus, V.

AU - Westerveld, W. J.

AU - Figeys, B.

AU - Rottenberg, X.

AU - Jansen, R.

N1 - Conference code: 20th

PY - 2019

Y1 - 2019

N2 - This paper presents a new type of accelerometer, the Micro-Opto-Mechanical Accelerometer (MOMA). Micro-opto-mechanical pressure sensors and microphones demonstrated already the excellent sensitivity on a very large pressure range which is possible thanks to their photonic read-out (1Pa precision over kPa range). In this paper, we design in the same technology an optical accelerometer using analytical equations as well as Finite Element simulations. The model takes into account the mechanical deformation of the device, its effect on the elongation of the waveguide, and also includes the optical losses. Using the opto-mechanical model, an optimum design is obtained varying device dimensions and waveguide positions in order to increase the accelerometer sensitivity.

AB - This paper presents a new type of accelerometer, the Micro-Opto-Mechanical Accelerometer (MOMA). Micro-opto-mechanical pressure sensors and microphones demonstrated already the excellent sensitivity on a very large pressure range which is possible thanks to their photonic read-out (1Pa precision over kPa range). In this paper, we design in the same technology an optical accelerometer using analytical equations as well as Finite Element simulations. The model takes into account the mechanical deformation of the device, its effect on the elongation of the waveguide, and also includes the optical losses. Using the opto-mechanical model, an optimum design is obtained varying device dimensions and waveguide positions in order to increase the accelerometer sensitivity.

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DO - 10.1109/EuroSimE.2019.8724569

M3 - Conference contribution

AN - SCOPUS:85067478980

BT - 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019

PB - IEEE

T2 - 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2019

Y2 - 24 March 2019 through 27 March 2019

ER -

Simulation and design of an optical accelerometer

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