Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology

Engineering

• Degree of Freedom 100%
• Vibration Isolation 100%
• Nanoscale 40%
• Environment 20%
• Production Line 20%
• Error 20%
• Scale Measurement 20%
• Experimental Result 20%
• Laboratory 20%
• Rotational 20%
• Position Sensor 20%
• Actuators 20%
• Design 20%
• Feedback Control System 20%
• Forming Tool 20%
• Production Environment 20%

INIS

• metrology 100%
• degrees of freedom 100%
• production 33%
• nanostructures 33%
• environment 33%
• control 16%
• design 16%
• laboratories 16%
• positioning 16%
• distance 16%
• actuators 16%
• feedback 16%
• errors 16%
• tools 16%
• sensors 16%

Keyphrases

• Vibration Isolation Platform 100%
• Vibration Isolation 40%
• Magnetically Levitated 20%