Size-dependency of cryo-icp-etching-based process for the fabrication of biomimetic membrane-in-recess microstructure

DHB Wicaksono, G Pandraud, G Craciun, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XIX, proceedings
Editorsde R Reus, S Bouwstra
Place of PublicationPiscataway
PublisherIEEE Society
Pages1-4
Number of pages4
ISBN (Print)84-475-2984-3
Publication statusPublished - 2005
EventThe 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain - Piscataway
Duration: 11 Sep 200514 Sep 2005

Publication series

Name
PublisherIEEE

Conference

ConferenceThe 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain
Period11/09/0514/09/05

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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