@inproceedings{72d61af8100848d7ab523c67048d8da1,
title = "Size-dependency of cryo-icp-etching-based process for the fabrication of biomimetic membrane-in-recess microstructure",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "DHB Wicaksono and G Pandraud and G Craciun and PJ French",
note = "Editor onbekend; The 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain ; Conference date: 11-09-2005 Through 14-09-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "84-475-2984-3",
publisher = "IEEE Society",
pages = "1--4",
editor = "{R Reus}, de and {S Bouwstra}",
booktitle = "Eurosensors XIX, proceedings",
}