Size effects on the bending stiffness of silicon nanocantilevers

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

The elastic behavior of silicon nanocantilevers and nanowires, and specifically the effective Young's modulus has been shown by previous experimental measurements and theoretical investigations to be size-dependent.
Original languageUndefined/Unknown
Title of host publicationProceedings of ProRISC 2009, 20th Annual Workshop on circuits, Systems and Signal Processing, SAFE 2009, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, November 26-27, 2009, Veldhoven, The Netherlands
Editors s.n.
Place of PublicationVeldhoven, The Netherlands
PublisherProRISC en SAFE
Pages108-111
Number of pages4
ISBN (Print)978-90-73461-62-8
Publication statusPublished - 2009
EventProRISC 2009, 20th Annual Workshop on Circuits, Systems and Signal Processing, SAFE 2009, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, Veldhoven, The Netherlands - Veldhoven, The Netherlands
Duration: 26 Nov 200927 Nov 2009

Publication series

Name
PublisherProRISC en SAFE

Conference

ConferenceProRISC 2009, 20th Annual Workshop on Circuits, Systems and Signal Processing, SAFE 2009, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, Veldhoven, The Netherlands
Period26/11/0927/11/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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