Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method

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Micro/nano resonant cantilevers with a laser deflection readout have been very popular in sensing applications over the past years. Despite the popularity, however, most of the research has been devoted to increasing the sensitivity, and very little attention has been focused on effects-induced errors. Among these effects, the surface effects and the so-called readout back-action are the two most influential causes of errors. In this paper, we investigate (1) the influence of the surface effects such as water adsorption, gas adsorption, and generally surface contaminations, and (2) the effect of the laser deflection detection, including power and positions of the laser, on the resonance frequency of silicon cantilevers. Our results show that both the surface contaminations and the laser back-action effects can significantly change the resonant response of the cantilevers. We conclude that the effects have to be taken into account, particularly in the case of ultra high sensitivity cantilevers.
Original languageUndefined/Unknown
Pages (from-to)105027-105036
Number of pages10
JournalJournal of Micromechanics and Microengineering
Issue number10
Publication statusPublished - 2010


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