Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of Transducers 2009
Editors	s.n.
Place of Publication	denver,usa
Publisher	Transducers
Pages	1425-1428
Number of pages	4
ISBN (Print)	978-1-4244-4193-8
Publication status	Published - 2009
Event	Transducers 2009 - USA Duration: 21 Jun 2009 → 25 Jun 2009

Name
Publisher	Transducers

Conference	Transducers 2009
Period	21/06/09 → 25/06/09

Keywords

@inproceedings{bcd40719f55b4b32b56f47c57fa4b538,

title = "Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-1-4244-4193-8",

publisher = "Transducers",

pages = "1425--1428",

editor = "s.n.",

booktitle = "Proceedings of Transducers 2009",

note = "Transducers 2009 ; Conference date: 21-06-2009 Through 25-06-2009",

}

TY - GEN

T1 - Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-4193-8

SP - 1425

EP - 1428

BT - Proceedings of Transducers 2009

A2 - s.n., null

PB - Transducers

CY - denver,usa

T2 - Transducers 2009

Y2 - 21 June 2009 through 25 June 2009

ER -