Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

7 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of Transducers 2009
Editors s.n.
Place of Publicationdenver,usa
PublisherTransducers
Pages1425-1428
Number of pages4
ISBN (Print)978-1-4244-4193-8
Publication statusPublished - 2009
EventTransducers 2009 - USA
Duration: 21 Jun 200925 Jun 2009

Publication series

Name
PublisherTransducers

Conference

ConferenceTransducers 2009
Period21/06/0925/06/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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