Stoichiometric transfer of complex oxides by pulsed laser deposition

B. Dam; J. H. Rector; J. Johansson; S. Kars; R. Griessen

doi:10.1016/0169-4332(95)00543-9

Stoichiometric transfer of complex oxides by pulsed laser deposition

B. Dam^*, J. H. Rector, J. Johansson, S. Kars, R. Griessen

^*Corresponding author for this work

ChemE/Chemical Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

25 Citations (Scopus)

Abstract

The interaction of a spatially uniform 248 nm excimer laser beam with targets of various oxides (YBa ₂ Cu ₃ O _{7 - δ} , Y ₂ BaCuO ₅ , Y ₂ O ₃ and SrTiO ₃ ) is investigated. We identify two different mechanisms for non-stoichiometric ablation. Evidence is found that in YBa ₂ Cu ₃ O _{7 - δ} and Y ₂ BaCuO ₅ the non-stoichiometric ablation at low fluences is due to a phase transformation of the target surface. This is a gradual process, only observable after prolonged irradiation of the target. For congruently melting SrTiO ₃ such a phase transformation is neither expected nor observed. We find, however, that at low fluences within 100 laser shots the target surface composition equilibrates to a stable, Ti-rich composition. In this case, the mechanism we propose is preferential ablation, which is accompanied by bulk diffusion to compensate the induced surface depletion.

Original language	English
Pages (from-to)	679-684
Number of pages	6
Journal	Applied Surface Science
Volume	96-98
DOIs	https://doi.org/10.1016/0169-4332(95)00543-9
Publication status	Published - Apr 1996

Bibliographical note

Funding Information:
We acknowledge with pleasure that the Y2 BaCuO, target was made by H. van Hal (Philips Research Laboratories Eindhoven) and that the RBS experiments were done at the AMOLF-FOM institute in Amsterdam. This work is part of the research program of FOM (Fundamenteel Onderzoek der Materiel which is financially supported by NW0 (Nederlands Wetenschappelijk Onderzoek).

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@article{755159e1b34c4b9c83553d351bbd2754,

title = "Stoichiometric transfer of complex oxides by pulsed laser deposition",

abstract = " The interaction of a spatially uniform 248 nm excimer laser beam with targets of various oxides (YBa 2 Cu 3 O 7 - δ , Y 2 BaCuO 5 , Y 2 O 3 and SrTiO 3 ) is investigated. We identify two different mechanisms for non-stoichiometric ablation. Evidence is found that in YBa 2 Cu 3 O 7 - δ and Y 2 BaCuO 5 the non-stoichiometric ablation at low fluences is due to a phase transformation of the target surface. This is a gradual process, only observable after prolonged irradiation of the target. For congruently melting SrTiO 3 such a phase transformation is neither expected nor observed. We find, however, that at low fluences within 100 laser shots the target surface composition equilibrates to a stable, Ti-rich composition. In this case, the mechanism we propose is preferential ablation, which is accompanied by bulk diffusion to compensate the induced surface depletion. ",

author = "B. Dam and Rector, {J. H.} and J. Johansson and S. Kars and R. Griessen",

note = "Funding Information: We acknowledge with pleasure that the Y2 BaCuO, target was made by H. van Hal (Philips Research Laboratories Eindhoven) and that the RBS experiments were done at the AMOLF-FOM institute in Amsterdam. This work is part of the research program of FOM (Fundamenteel Onderzoek der Materiel which is financially supported by NW0 (Nederlands Wetenschappelijk Onderzoek).",

year = "1996",

month = apr,

doi = "10.1016/0169-4332(95)00543-9",

language = "English",

volume = "96-98",

pages = "679--684",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

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TY - JOUR

T1 - Stoichiometric transfer of complex oxides by pulsed laser deposition

AU - Dam, B.

AU - Rector, J. H.

AU - Johansson, J.

AU - Kars, S.

AU - Griessen, R.

N1 - Funding Information: We acknowledge with pleasure that the Y2 BaCuO, target was made by H. van Hal (Philips Research Laboratories Eindhoven) and that the RBS experiments were done at the AMOLF-FOM institute in Amsterdam. This work is part of the research program of FOM (Fundamenteel Onderzoek der Materiel which is financially supported by NW0 (Nederlands Wetenschappelijk Onderzoek).

PY - 1996/4

Y1 - 1996/4

N2 - The interaction of a spatially uniform 248 nm excimer laser beam with targets of various oxides (YBa 2 Cu 3 O 7 - δ , Y 2 BaCuO 5 , Y 2 O 3 and SrTiO 3 ) is investigated. We identify two different mechanisms for non-stoichiometric ablation. Evidence is found that in YBa 2 Cu 3 O 7 - δ and Y 2 BaCuO 5 the non-stoichiometric ablation at low fluences is due to a phase transformation of the target surface. This is a gradual process, only observable after prolonged irradiation of the target. For congruently melting SrTiO 3 such a phase transformation is neither expected nor observed. We find, however, that at low fluences within 100 laser shots the target surface composition equilibrates to a stable, Ti-rich composition. In this case, the mechanism we propose is preferential ablation, which is accompanied by bulk diffusion to compensate the induced surface depletion.

AB - The interaction of a spatially uniform 248 nm excimer laser beam with targets of various oxides (YBa 2 Cu 3 O 7 - δ , Y 2 BaCuO 5 , Y 2 O 3 and SrTiO 3 ) is investigated. We identify two different mechanisms for non-stoichiometric ablation. Evidence is found that in YBa 2 Cu 3 O 7 - δ and Y 2 BaCuO 5 the non-stoichiometric ablation at low fluences is due to a phase transformation of the target surface. This is a gradual process, only observable after prolonged irradiation of the target. For congruently melting SrTiO 3 such a phase transformation is neither expected nor observed. We find, however, that at low fluences within 100 laser shots the target surface composition equilibrates to a stable, Ti-rich composition. In this case, the mechanism we propose is preferential ablation, which is accompanied by bulk diffusion to compensate the induced surface depletion.

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U2 - 10.1016/0169-4332(95)00543-9

DO - 10.1016/0169-4332(95)00543-9

M3 - Article

AN - SCOPUS:0030562982

SN - 0169-4332

VL - 96-98

SP - 679

EP - 684

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Stoichiometric transfer of complex oxides by pulsed laser deposition

Abstract

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