Stress and stress gradients in magnetron sputtered TiN layers.

J-D Kamminga, R Delhez, Th.H de Keijser, EJ Mittemeijer

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationConference Proceedings of the Fifth International Conference on Residual Stresses.
    EditorsT Ericsson, M Oden, A Anderson
    Pages868-873
    Number of pages6
    Publication statusPublished - 1998

    Cite this

    Kamminga, J-D., Delhez, R., de Keijser, T. H., & Mittemeijer, EJ. (1998). Stress and stress gradients in magnetron sputtered TiN layers. In T. Ericsson, M. Oden, & A. Anderson (Eds.), Conference Proceedings of the Fifth International Conference on Residual Stresses. (pp. 868-873)