Stress and stress gradients in magnetron sputtered TiN layers.

J-D Kamminga, R Delhez, Th.H de Keijser, EJ Mittemeijer

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationConference Proceedings of the Fifth International Conference on Residual Stresses.
    EditorsT Ericsson, M Oden, A Anderson
    Number of pages6
    Publication statusPublished - 1998

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