Original language | Undefined/Unknown |
---|---|
Title of host publication | Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices |
Editors | E Garfunkel, E Gusev, A Vul |
Publisher | Kluwer Academic Publishers |
Pages | 25-38 |
ISBN (Print) | 0-7923-5007 |
Publication status | Published - 1998 |
Keywords
- ZX Int.klas.verslagjaar < 2002