Abstract
At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.
| Original language | English |
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| Title of host publication | 2016 IEEE Sensors Proceedings |
| Editors | E. Fontana, C. Ruiz-Zamarreno |
| Place of Publication | Piscataway, NJ |
| Publisher | IEEE |
| Pages | 1-3 |
| Number of pages | 3 |
| ISBN (Electronic) | 978-1-4799-8287-5 |
| DOIs | |
| Publication status | Published - 2016 |
| Event | IEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States Duration: 30 Oct 2016 → 2 Nov 2016 Conference number: 15 |
Conference
| Conference | IEEE Sensors 2016 |
|---|---|
| Country/Territory | United States |
| City | Orlando, FL |
| Period | 30/10/16 → 2/11/16 |
Keywords
- Archimedean coil
- eddy-current sensor
- position sensor
- self-resonance frequency
- modelling