Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

Johan Vogel, Stoyan Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)


At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.
Original languageEnglish
Title of host publication2016 IEEE Sensors Proceedings
EditorsE. Fontana, C. Ruiz-Zamarreno
Place of PublicationPiscataway, NJ
Number of pages3
ISBN (Electronic)978-1-4799-8287-5
Publication statusPublished - 2016
EventIEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States
Duration: 30 Oct 20162 Nov 2016
Conference number: 15


ConferenceIEEE Sensors 2016
Country/TerritoryUnited States
CityOrlando, FL


  • Archimedean coil
  • eddy-current sensor
  • position sensor
  • self-resonance frequency
  • modelling


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