Suppression of crystalline growth in silicon films deposited from hydrogen diluted silane using a layer-by-layer approach

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@article{d3c015a57d954d06a31d7a0bd71f9123,

title = "Suppression of crystalline growth in silicon films deposited from hydrogen diluted silane using a layer-by-layer approach",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Elzakker}, G and FD Tichelaar and M Zeman",

year = "2007",

language = "Undefined/Unknown",

volume = "515",

pages = "7460--7464",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "19",

}

TY - JOUR

T1 - Suppression of crystalline growth in silicon films deposited from hydrogen diluted silane using a layer-by-layer approach

AU - van Elzakker, G

AU - Tichelaar, FD

AU - Zeman, M

PY - 2007

Y1 - 2007

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0040-6090

VL - 515

SP - 7460

EP - 7464

JO - Thin Solid Films

JF - Thin Solid Films

IS - 19

ER -