Surface kinetics in copper CVD.

MLH ter Heerdt, PJ van der Put, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{3f7ca88f73eb42488a75d160d68a55e1,

title = "Surface kinetics in copper CVD.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{ter Heerdt}, MLH and {van der Put}, PJ and J Schoonman",

year = "2001",

language = "Undefined/Unknown",

volume = "7",

pages = "199--203",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley",

number = "5",

}