Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system

D de Roover, OH Bosgra

Research output: Contribution to journalArticleScientific

152 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)968-979
Number of pages12
JournalInternational Journal of Control
Volume73
Issue number10
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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