Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces

V Mohammadi, N Golshani, C Mok Kai Rine, WB De Boer, J Derakhshandeh Kheljani, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)45-50
Number of pages6
JournalMicroelectronic Engineering
Volume125
DOIs
Publication statusPublished - 2014

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