Tensile stress in hard metal films

GCAM Janssen; AJ Dammers; VGM Sivel; WR Wang

Tensile stress in hard metal films

GCAM Janssen, AJ Dammers, VGM Sivel, WR Wang

Research output: Contribution to conference › Poster › Professional

Original language	Undefined/Unknown
Publication status	Published - 2003
Event	The third edition of lectures on "Nouvelles Tendances en Prodedes magnetron et Arc pour le Depot de Couches Minces" - Gent Duration: 24 Nov 2003 → 25 Nov 2003

Other

Other	The third edition of lectures on "Nouvelles Tendances en Prodedes magnetron et Arc pour le Depot de Couches Minces"
Period	24/11/03 → 25/11/03

Cite this

@conference{05bb3edcef9a4fadb1dfa87152785c42,

title = "Tensile stress in hard metal films",

author = "GCAM Janssen and AJ Dammers and VGM Sivel and WR Wang",

year = "2003",

language = "Undefined/Unknown",

note = "The third edition of lectures on {"}Nouvelles Tendances en Prodedes magnetron et Arc pour le Depot de Couches Minces{"} ; Conference date: 24-11-2003 Through 25-11-2003",

}