Tensile stress in hard metal films

GCAM Janssen, AJ Dammers, VGM Sivel, WR Wang

    Research output: Contribution to conferencePosterProfessional

    52 Citations (Scopus)
    Original languageUndefined/Unknown
    Publication statusPublished - 2003
    EventThe third edition of lectures on "Nouvelles Tendances en Prodedes magnetron et Arc pour le Depot de Couches Minces" - Gent
    Duration: 24 Nov 200325 Nov 2003

    Other

    OtherThe third edition of lectures on "Nouvelles Tendances en Prodedes magnetron et Arc pour le Depot de Couches Minces"
    Period24/11/0325/11/03

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