The Impact of Gate Recess on the H2 Detection Properties of Pt-AlGaN/GaN HEMT Sensors

Robert Sokolovskij, Jian Zhang, Hongze Zheng, Wenmao Li, Yang Jiang, Gaiying Yang, Hongyu Yu, Pasqualina M. Sarro, Guoqi Zhang

Research output: Contribution to journalArticleScientificpeer-review

3 Downloads (Pure)

Abstract

The present work reports on the hydrogen gas detection properties of Pt-AlGaN/GaN high electron mobility transistor (HEMT) sensors with recessed gate structure. Devices with gate recess depths from 5 to 15 nm were fabricated using a precision cyclic etching method, examined with AFM, STEM and EDS, and tested towards H 2 response at high temperature. With increasing recess depth, the threshold voltage (VTH) shifted from -1.57 to 1.49 V. A shallow recess (5 nm) resulted in a 1.03 mA increase in signal variation (AIDS), while a deep recess (15 nm) resulted in the highest sensing response (S) of 145.8% towards 300 ppm H 2 as compared to reference sensors without gate recess. Transient measurements demonstrated reversible H 2 response for all tested devices. The response and recovery time towards 250 ppm gradually decreased from 7.3 to 2.5 min and from 29.2 to 8.85 min going from 0 nm to 15 nm recess depth. The power consumption of the sensors reduced with increasing recess depth from 146.6 to 2.95 mW.
Original languageEnglish
Pages (from-to)8947-8955
Number of pages9
JournalIEEE Sensors
Volume20
Issue number16
Publication statusPublished - 2020

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Fingerprint

Dive into the research topics of 'The Impact of Gate Recess on the H2 Detection Properties of Pt-AlGaN/GaN HEMT Sensors'. Together they form a unique fingerprint.

Cite this