Thermal property of LPCVD SiN membrane for far infrared sensor application

DHB Wicaksono, F jutzi, G Pandraud, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Thermal property of LPCVD SiN membrane for far infrared sensor application
Editors	s.n.
Place of Publication	delft, the netherlands
Publisher	ISSM
Pages	168-173
Number of pages	6
ISBN (Print)	0855-8692
Publication status	Published - 2008
Event	Indonesian students scientific meeting (ISSM) 2008 - delft, the netherlands Duration: 13 May 2008 → 15 May 2008

Name
Publisher	ISSM

Conference	Indonesian students scientific meeting (ISSM) 2008
Period	13/05/08 → 15/05/08

Keywords

@inproceedings{ae48efa1aa7b41daadd55167240fc4f2,

title = "Thermal property of LPCVD SiN membrane for far infrared sensor application",

keywords = "Elektrotechniek, Techniek, conference contrib. non-refer., Conf.proc. > 3 pag",

author = "DHB Wicaksono and F jutzi and G Pandraud and PJ French",

year = "2008",

language = "Undefined/Unknown",

isbn = "0855-8692",

publisher = "ISSM",

pages = "168--173",

editor = "s.n.",

booktitle = "Thermal property of LPCVD SiN membrane for far infrared sensor application",

note = "Indonesian students scientific meeting (ISSM) 2008 ; Conference date: 13-05-2008 Through 15-05-2008",

}

TY - GEN

T1 - Thermal property of LPCVD SiN membrane for far infrared sensor application

AU - Wicaksono, DHB

AU - jutzi, F

AU - Pandraud, G

AU - French, PJ

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. non-refer.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0855-8692

SP - 168

EP - 173

BT - Thermal property of LPCVD SiN membrane for far infrared sensor application

A2 - s.n., null

PB - ISSM

CY - delft, the netherlands

T2 - Indonesian students scientific meeting (ISSM) 2008

Y2 - 13 May 2008 through 15 May 2008

ER -