TY - GEN
T1 - Thermally regenerable optical transparent MEMS windows for exhaust gas analysis
AU - Ghaderi, Amir
AU - Middelburg, Luke M.
AU - Bilby, David
AU - Visser, Jaco
AU - Lundgren, Per
AU - Enoksson, Peter
AU - Wolffenbuttel, Reinoud
PY - 2020
Y1 - 2020
N2 - Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.
AB - Exhaust gas measurement in the harsh environment of the tailpipe by optical techniques is a highly robust technique, provided that optical access is maintained in the presence of soot. The design, fabrication, and testing of membranes in SiC-on-Si with integrated heaters to serve as a regenerable MEMS optical window into the tailpipe are presented. Membranes at slightly elevated temperatures are demonstrated to keep the surface transparent by thermophoresis, while surface regeneration is achieved at pulsed high temperatures, which allows long-term optical measurement in the exhaust.
UR - http://www.scopus.com/inward/record.url?scp=85118741681&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85118741681
T3 - Optics InfoBase Conference Papers
BT - Applied Industrial Spectroscopy, AIS 2020
PB - OSA - The Optical Society
T2 - Applied Industrial Spectroscopy, AIS 2020 - Part of Optical Sensors and Sensing Congress 2020
Y2 - 22 June 2020 through 26 June 2020
ER -