Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

J Wei, T Chu Duc, M van der Velden, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

25 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	SAFE 2007 Semiconductor advances for future electornics
Editors	s.n.
Place of Publication	Veldhoven, The Netherlands
Publisher	IEEE Society
Pages	625-628
Number of pages	4
ISBN (Print)	978-90-73461-49-9
Publication status	Published - 2007

Name
Publisher	IEEE

Keywords

@inproceedings{ccfa1034debd4db7a1b3dc3fd24f6e8f,

title = "Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "J Wei and {Chu Duc}, T and {van der Velden}, M and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-90-73461-49-9",

publisher = "IEEE Society",

pages = "625--628",

editor = "s.n.",

booktitle = "SAFE 2007 Semiconductor advances for future electornics",

}

TY - GEN

T1 - Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

AU - Wei, J

AU - Chu Duc, T

AU - van der Velden, M

AU - Sarro, PM

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-49-9

SP - 625

EP - 628

BT - SAFE 2007 Semiconductor advances for future electornics

A2 - s.n., null

PB - IEEE Society

CY - Veldhoven, The Netherlands

ER -