Ultra-Shallow Dopant Diffusion from Pre-deposited RPCVD Monolayers of Arsenic and Phosphorus

M Popadic, LK Nanver, TLM Scholtes

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name
Publisher	IEEE

Keywords

@inproceedings{d25e390e7b0f40879396c0c99fdb85a0,

title = "Ultra-Shallow Dopant Diffusion from Pre-deposited RPCVD Monolayers of Arsenic and Phosphorus",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "M Popadic and LK Nanver and TLM Scholtes",

year = "2007",

language = "Undefined/Unknown",

publisher = "IEEE",

pages = "1--4",

editor = "s.n.",

booktitle = "Proc. IEEE RTP 2007",

address = "United States",

}