Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning (U-SP-2-I-ICT)

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	69-83
Number of pages	15
Journal	IEEE Journal of Microelectromechanical Systems
Volume	15
Issue number	1
Publication status	Published - 2006

Keywords

@article{259e4ab2ed904260a3421870357c211b,

title = "Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning (U-SP-2-I-ICT)",

keywords = "Elektrotechniek, Techniek, popular journal papers, CWTS JFIS >= 2.00",

author = "RF Wolffenbuttel and LA Rocha and E Cretu",

year = "2006",

language = "Undefined/Unknown",

volume = "15",

pages = "69--83",

journal = "IEEE Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "1",

}

TY - JOUR

T1 - Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning (U-SP-2-I-ICT)

AU - Wolffenbuttel, RF

AU - Rocha, LA

AU - Cretu, E

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - popular journal papers

KW - CWTS JFIS >= 2.00

M3 - Article

SN - 1057-7157

VL - 15

SP - 69

EP - 83

JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

IS - 1

ER -