@inproceedings{231f7effdeaa4c94b75eecce29cb2b6c,
title = "Very thin SiC membranes for micromachines vacuum sensors",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "HTM Pham and C Fan and G Pandraud and JF Creemer and {van der Pers}, NM and P Visser and K Kwakernaak and PM Sarro",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2581-5",
publisher = "IEEE Sensors",
pages = "1143--1146",
editor = "s.n.",
booktitle = "Proceedings of IEEE sensors 2008",
note = "IEEE Sensors 2008 ; Conference date: 26-10-2008 Through 29-10-2008",
}