Very thin SiC membranes for micromachines vacuum sensors

HTM Pham, C Fan, G Pandraud, JF Creemer, NM van der Pers, P Visser, K Kwakernaak, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of IEEE sensors 2008
Editors s.n.
Place of PublicationLecce,Italy
PublisherIEEE Sensors
Pages1143-1146
Number of pages4
ISBN (Print)978-1-4244-2581-5
Publication statusPublished - 2008
EventIEEE Sensors 2008 - Lecce, Italy
Duration: 26 Oct 200829 Oct 2008

Publication series

Name
PublisherIEEE sensors

Conference

ConferenceIEEE Sensors 2008
CountryItaly
CityLecce
Period26/10/0829/10/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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