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Mechatronic Systems Design
Mechanical Engineering
Precision and Microsystems Engineering
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Network
Researchers
(46)
Research output
(767)
Datasets
(3)
Prizes
(1)
Activities
(12)
Press/Media
(4)
Research output
Research output per year
1997
2006
2007
2008
2009
2010
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
324
Conference contribution
285
Article
58
Patent
38
Dissertation (TU Delft)
62
More
12
Chapter
11
Conference article
10
Poster
9
Abstract
5
Book
4
Review article
3
Editorial
2
Meeting Abstract
2
Comment/Letter to the editor
1
Book editing
1
Paper
1
Special issue
1
Digital or Visual Products
Research output per year
Research output per year
50 - 58 out of 58 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
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Patent
Search results
2006
Magnetic support system
Nijsse, GJP.
&
Spronck, JW.
,
2006
, IPC No. TU Delft the Netherlands, Patent No. KR 102007003201, Priority date
28 Feb 2006
Research output
:
Patent
2005
A method for manfacturing a menbrane in a surface of a (100) silicum wafer
Venstra, WJ.
,
2005
, IPC No. niet eerder opgenomen, Patent No. NL1022995C, Priority date
22 Sept 2004
Research output
:
Patent
Lithographic apparatus and device manufacturing method
Dansberg, MP.
,
Cornelissen, SM.
,
Cox, HHM.
,
Diesen, RJP.
,
Kemper, NR.
,
Munnig Schmidt, RH.
,
Schoot, HK.
&
Jansens, R.
,
2005
, IPC No. ASML Netherlands, Patent No. JP2005079585, Priority date
24 Mar 2005
Research output
:
Patent
Lithographic apparatus and device manufacturing method
Munnig Schmidt, RH.
,
Jager, P. W. H.
&
Akker, TL.
,
2005
, IPC No. ASML Netherlands, Patent No. US2005286039, Priority date
29 Dec 2005
Research output
:
Patent
Lithographic apparatus and device manufacturing method
Schothorst, G.
,
van Eijk, J.
,
Loopstra, EL.
,
Munnig Schmidt, RH.
&
Peeters, FGP.
,
2005
, IPC No. ASML Netherlands, Patent No. US2005041233, Priority date
24 Feb 2005
Research output
:
Patent
Movable stage system, lithographic apparatus, and device manufacturing method
Loopstra, E.
&
Munnig Schmidt, RH.
,
2005
, IPC No. ASML Netherlands bv, Patent No. US2005099616, Priority date
12 May 2005
Research output
:
Patent
patent nummer US6402118
Nijsse, GJP.
&
Spronck, JW.
,
2005
, IPC No. niet eerder opgenomen, Patent No. NL1022995C, Priority date
11 Jun 2002
Research output
:
Patent
Positioning device
Munnig Schmidt, RH.
,
2005
, IPC No. ASML Netherlands bv, Patent No. US2005200825, Priority date
15 Sept 2005
Research output
:
Patent
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