A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs

Marta Saccher, Rob van Schaijk, Shinnosuke Kawasaki, Johan H. Klootwijk, Amin Rashidi, Vasiliki Giagka, Alessandro Stuart Savoia, Ronald Dekker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Abstract

Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.
Original languageEnglish
Title of host publicationProceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Place of PublicationPiscataway
PublisherIEEE
Number of pages4
ISBN (Electronic)979-8-3503-4645-9
ISBN (Print)979-8-3503-4646-6
DOIs
Publication statusPublished - 2023
Event2023 IEEE International Ultrasonics Symposium (IUS) - Montreal, Canada
Duration: 3 Sept 20238 Sept 2023

Conference

Conference2023 IEEE International Ultrasonics Symposium (IUS)
Abbreviated titleIUS 2023
Country/TerritoryCanada
CityMontreal
Period3/09/238/09/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • pre-charged CMUT
  • Capacitive Micromachined Ultrasound Transducer
  • zero-bias transducers
  • ultrasonic power transfer

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