A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs

Marta Saccher; Rob van Schaijk; Shinnosuke Kawasaki; Johan H. Klootwijk; Amin Rashidi; Vasiliki Giagka; Alessandro Stuart Savoia; Ronald Dekker

doi:10.1109/IUS51837.2023.10307389

A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs

Marta Saccher, Rob van Schaijk, Shinnosuke Kawasaki, Johan H. Klootwijk, Amin Rashidi, Vasiliki Giagka, Alessandro Stuart Savoia, Ronald Dekker

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.

Original language	English
Title of host publication	Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Place of Publication	Piscataway
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	979-8-3503-4645-9
ISBN (Print)	979-8-3503-4646-6
DOIs	https://doi.org/10.1109/IUS51837.2023.10307389
Publication status	Published - 2023
Event	2023 IEEE International Ultrasonics Symposium (IUS) - Montreal, Canada Duration: 3 Sept 2023 → 8 Sept 2023

Conference

Conference	2023 IEEE International Ultrasonics Symposium (IUS)
Abbreviated title	IUS 2023
Country/Territory	Canada
City	Montreal
Period	3/09/23 → 8/09/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

pre-charged CMUT
Capacitive Micromachined Ultrasound Transducer
zero-bias transducers
ultrasonic power transfer

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10.1109/IUS51837.2023.10307389

A_Comparative_Study_of_Si3N4_and_Al2O3_as_Dielectric_Materials_for_Pre-Charged_Collapse-Mode_CMUTsFinal published version, 6.88 MB

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@inproceedings{c3cad0fb917449f0b02b767ba61a4fab,

title = "A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs",

abstract = "Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.",

keywords = "pre-charged CMUT, Capacitive Micromachined Ultrasound Transducer, zero-bias transducers, ultrasonic power transfer",

author = "Marta Saccher and Schaijk, {Rob van} and Shinnosuke Kawasaki and Klootwijk, {Johan H.} and Amin Rashidi and Vasiliki Giagka and Savoia, {Alessandro Stuart} and Ronald Dekker",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 IEEE International Ultrasonics Symposium (IUS), IUS 2023 ; Conference date: 03-09-2023 Through 08-09-2023",

year = "2023",

doi = "10.1109/IUS51837.2023.10307389",

language = "English",

isbn = "979-8-3503-4646-6",

booktitle = "Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)",

publisher = "IEEE",

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Saccher, M, Schaijk, RV, Kawasaki, S, Klootwijk, JH, Rashidi, A , Giagka, V, Savoia, AS & Dekker, R 2023, A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs. in Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS). IEEE, Piscataway, 2023 IEEE International Ultrasonics Symposium (IUS), Montreal, Canada, 3/09/23. https://doi.org/10.1109/IUS51837.2023.10307389

A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs. / Saccher, Marta; Schaijk, Rob van; Kawasaki, Shinnosuke et al.
Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS). Piscataway: IEEE, 2023.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs

AU - Saccher, Marta

AU - Schaijk, Rob van

AU - Kawasaki, Shinnosuke

AU - Klootwijk, Johan H.

AU - Rashidi, Amin

AU - Giagka, Vasiliki

AU - Savoia, Alessandro Stuart

AU - Dekker, Ronald

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.

AB - Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric. This study aims to compare the performance of Si 3 N 4 and Al 2 O 3 when used as a charge storage layer. By measuring the shift in the C-V curve, Si 3 N 4 exhibits a larger shift than Al 2 O 3 , indicating a better charge-trapping capability. When using the pre-charged CMUTs as power receivers, the Si 3 N 4 version harvested up to 80 mW -only a few mW more than the Al 2 O 3 - with an efficiency of about 50 %. Accelerated Lifetime Tests predict a lifetime of about 7.8 and 1.2 years for Si 3 N 4 and Al 2 O 3 respectively.

KW - pre-charged CMUT

KW - Capacitive Micromachined Ultrasound Transducer

KW - zero-bias transducers

KW - ultrasonic power transfer

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U2 - 10.1109/IUS51837.2023.10307389

DO - 10.1109/IUS51837.2023.10307389

M3 - Conference contribution

SN - 979-8-3503-4646-6

BT - Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)

PB - IEEE

CY - Piscataway

T2 - 2023 IEEE International Ultrasonics Symposium (IUS)

Y2 - 3 September 2023 through 8 September 2023

ER -

A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTs

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Bibliographical note

Keywords

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