A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

SL Paalvast, HW van Zeijl, PM Sarro, J van Eijk

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)S197-S203
JournalJournal of Micromechanics and Microengineering
Publication statusPublished - 2007


  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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