A large current scanning electron microscope with MEMS-based multi-beam optics

T Ichimura, Y Ren, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	109-113
Number of pages	5
Journal	Microelectronic Engineering
Volume	113
DOIs	https://doi.org/10.1016/j.mee.2013.07.008
Publication status	Published - 2013

Access to Document

@article{6449f9ced4a24257875dae768c1a8d43,

title = "A large current scanning electron microscope with MEMS-based multi-beam optics",

author = "T Ichimura and Y Ren and P Kruit",

year = "2013",

doi = "10.1016/j.mee.2013.07.008",

language = "Undefined/Unknown",

volume = "113",

pages = "109--113",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}