A large current scanning electron microscope with MEMS-based multi-beam optics

T Ichimura, Y Ren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)109-113
    Number of pages5
    JournalMicroelectronic Engineering
    Volume113
    DOIs
    Publication statusPublished - 2013

    Cite this