A large current scanning electron microscope with MEMS-based multi-beam optics

T Ichimura, Y Ren, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	109-113
Number of pages	5
Journal	Microelectronic Engineering
Volume	113
Publication status	Published - 2014

Cite this

@article{70db3ede01634200bc04f4f758352363,

title = "A large current scanning electron microscope with MEMS-based multi-beam optics",

author = "T Ichimura and Y Ren and P Kruit",

year = "2014",

language = "English",

volume = "113",

pages = "109--113",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}