A large current scanning electron microscope with MEMS-based multi-beam optics

T Ichimura, Y Ren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)109-113
    Number of pages5
    JournalMicroelectronic Engineering
    Volume113
    Publication statusPublished - 2014

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