A low-cost BiCMOS process with metal gates

HW van Zeijl, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSymposium proceedings. Vol. 611
Editors LA Clevenger, ... [et Al]
Place of PublicationWarrendale
PublisherMaterial Research Society
Pages1-6
Number of pages6
ISBN (Print)0272-9172
Publication statusPublished - 2000
EventGate Stack and Silicide Issues in Silicon Processing, San Francisco - Warrendale
Duration: 25 Apr 200027 Apr 2000

Publication series

Name
PublisherMaterial Research Society

Conference

ConferenceGate Stack and Silicide Issues in Silicon Processing, San Francisco
Period25/04/0027/04/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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