Original language | Undefined/Unknown |
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Title of host publication | Symposium proceedings. Vol. 611 |
Editors | LA Clevenger, ... [et Al] |
Place of Publication | Warrendale |
Publisher | Material Research Society |
Pages | 1-6 |
Number of pages | 6 |
ISBN (Print) | 0272-9172 |
Publication status | Published - 2000 |
Event | Gate Stack and Silicide Issues in Silicon Processing, San Francisco - Warrendale Duration: 25 Apr 2000 → 27 Apr 2000 |
Publication series
Name | |
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Publisher | Material Research Society |
Conference
Conference | Gate Stack and Silicide Issues in Silicon Processing, San Francisco |
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Period | 25/04/00 → 27/04/00 |
Keywords
- ZX Int.klas.verslagjaar < 2002