@inproceedings{b3c45c389d024533997dc8443eece572,
title = "A low-cost BiCMOS process with metal gates",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "{van Zeijl}, HW and LK Nanver",
year = "2000",
language = "Undefined/Unknown",
isbn = "0272-9172",
publisher = "Material Research Society",
pages = "1--6",
editor = "{LA Clevenger} and {... [et Al]}",
booktitle = "Symposium proceedings. Vol. 611",
note = "Gate Stack and Silicide Issues in Silicon Processing, San Francisco ; Conference date: 25-04-2000 Through 27-04-2000",
}