A novel Selected Area Laser Assisted (SALA) system for crystallization and doping processes in low-temperature poly-Si thin-film transistors

R Ishihara, A Glazer, Y Raab, P Rusian, M Dorfan, B Lavi, I Leizerson, A Kishinevsky, Y van Andel, X Cao, JW Metselaar, CIM Beenakker, S Stolyarova, Y Nemirovsky

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)136-140
Number of pages5
JournalIEICE Transactions on Electronics
Issue number10
Publication statusPublished - 2006


  • academic journal papers
  • CWTS JFIS < 0.75

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