A Piezo-driven TEM-stage with subnanometer position stability

BM Mertens, H van der Wulp, HF van Beek, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageEnglish
    Title of host publicationProceedings of the Joint Meeting BVM/NVVM
    EditorsHK Koerten
    Number of pages2
    Publication statusPublished - 1996

    Bibliographical note

    ISSN 1381-1371

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