A Piezo-driven TEM-stage with subnanometer position stability

BM Mertens, H van der Wulp, HF van Beek, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	English
Title of host publication	Proceedings of the Joint Meeting BVM/NVVM
Editors	HK Koerten
Pages	146-147
Number of pages	2
Publication status	Published - 1996

ISSN 1381-1371

Cite this

@inproceedings{e35ca3fd278c49268aa798f431b4befa,

title = "A Piezo-driven TEM-stage with subnanometer position stability",

author = "BM Mertens and {van der Wulp}, H and {van Beek}, HF and P Kruit",

note = "ISSN 1381-1371",

year = "1996",

language = "English",

pages = "146--147",

editor = "HK Koerten",

booktitle = "Proceedings of the Joint Meeting BVM/NVVM",

}