Aberration model of a multi beam scanning microscope for electron beam-induced deposition

MJ van Bruggen, B van Someren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)42-47
    Number of pages6
    JournalScanning: the journal of scanning microscopies
    Issue number1
    Publication statusPublished - 2006


    • academic journal papers
    • CWTS JFIS < 0.75

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