Aberration model of a multi beam scanning microscope for electron beam-induced deposition

MJ van Bruggen, B van Someren, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	42-47
Number of pages	6
Journal	Scanning: the journal of scanning microscopies
Volume	28
Issue number	1
Publication status	Published - 2006

Keywords

@article{d0142fdc022a458ea4d25f5af976ff7e,

title = "Aberration model of a multi beam scanning microscope for electron beam-induced deposition",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "{van Bruggen}, MJ and {van Someren}, B and P Kruit",

year = "2006",

language = "Undefined/Unknown",

volume = "28",

pages = "42--47",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley & Sons",

number = "1",

}

TY - JOUR

T1 - Aberration model of a multi beam scanning microscope for electron beam-induced deposition

AU - van Bruggen, MJ

AU - van Someren, B

AU - Kruit, P

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS JFIS < 0.75

M3 - Article

SN - 0161-0457

VL - 28

SP - 42

EP - 47

JO - Scanning: the journal of scanning microscopies

JF - Scanning: the journal of scanning microscopies

IS - 1

ER -