An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implants

Amin Rashidi, Marta Saccher, Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian, Alessandro Stuart Savoia, Frederik Lavigne, Frederic Stubbe, Ronald Dekker, Vasiliki Giagka

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and lowtemperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended time. The accumulated energy is then used to power a DC load, which leads to a long start-up time, and insufficient duty cycle for some applications. We present an ultrasonically powered system for biomedical implants capable of delivering mW-range instantaneous power to DC loads, without pre-storing it. The system features a 25 mm2 AlN PMUT, an inductive matching network, and an application-specific power management integrated circuit(ASIC). For an acoustic intensity of 360 mW/cm2 at the surface of the PMUT, an open-circuit voltage of 1.11 V and an aperture efficiency of 30.5 % are measured. Furthermore, by connecting a series-matching inductor to the PMUT, the highest-reported power delivered to the load (PDL) of 6.4 mW is measured over an optimal load of 7.6 Ω. Finally, together with the ASIC and at the intensity of 108 mW/cm2, our system delivers 1.04 mW DC power to a 3.3 kΩ load, which is over two orders of magnitude higher than the previously reported average DC power for AlN PMUTs.
Original languageEnglish
Title of host publicationProceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Place of PublicationPiscataway
Number of pages4
ISBN (Electronic)979-8-3503-4645-9
ISBN (Print)979-8-3503-4646-6
Publication statusPublished - 2023
Event2023 IEEE International Ultrasonics Symposium (IUS) - Montreal, Canada
Duration: 3 Sep 20238 Sep 2023


Conference2023 IEEE International Ultrasonics Symposium (IUS)
Abbreviated titleIUS 2023

Bibliographical note

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Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


  • ultrasonic powering
  • AlN PMUT
  • matching network
  • power management
  • implants

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