Analysis of Si-Ti and Si-TiN interface after 300°C or 400°C alloying

G Lorito, LK Nanver, H Schellevis

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2007 Semiconductor advances for future electornics
Editors	s.n.
Place of Publication	s.l.
Publisher	STW
Pages	1-4
Number of pages	4
Publication status	Published - 2007

Name
Publisher	STW

Keywords

@inproceedings{052b7a037be94e2db93f05f90270657b,

title = "Analysis of Si-Ti and Si-TiN interface after 300°C or 400°C alloying",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "G Lorito and LK Nanver and H Schellevis",

year = "2007",

language = "Undefined/Unknown",

publisher = "STW",

pages = "1--4",

editor = "s.n.",

booktitle = "SAFE 2007 Semiconductor advances for future electornics",

}