Backwafer optical lithography and wafer distortion in substrate transfer technologies

HW van Zeijl, JHCM Slabbekoorn, LK Nanver, PWL van Dijk, A Berthold, T Machielsen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

8 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE, vol. 4181
Editors D Burnett, S Kimura, B Singh
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages200-207
Number of pages8
ISBN (Print)0-8194-3842-1
Publication statusPublished - 2000
EventChallenges in Process Integration and Device Technology, Santa Clara - Bellingham
Duration: 18 Sep 200019 Sep 2000

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceChallenges in Process Integration and Device Technology, Santa Clara
Period18/09/0019/09/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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