Chemical-mechanical relationship of amorphous/porous low-dielectric film materials

CA Yuan, O van der Sluis, GQ Zhang, LJ Ernst, WD van Driel, RBR van Silfhout, BJ Thijsse

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)606-613
Number of pages8
JournalComputational Materials Science
Volume42
DOIs
Publication statusPublished - 2007

Keywords

  • CWTS 0.75 <= JFIS < 2.00

Cite this