Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method (Microsystems & Nanoengineering, (2023), 9, 1, (63), 10.1038/s41378-023-00532-0)

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• 1 Article

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• 2023

  Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

  Hong, H., Wei, J., Lei, X., Chen, H., Sarro, P. M., Zhang, G. & Liu, Z., 2023, In: Microsystems and Nanoengineering. 9, 1, 63.

  Research output: Contribution to journal › Article › Scientific › peer-review

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  • single crystals 100%
  • fabrication 100%
  • silicon 100%
  • etching 100%
  • size 100%
  1 Citation (Scopus)

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