@inproceedings{ba55662db4df4bc0b02b8608d4b31708,
title = "Design and Fabrication of a Miniaturized Gas Ionization Chamber for Production of High Quality Ion Beams",
keywords = "Conf.proc. > 3 pag",
author = "DS Jun and VG Kutchoukov and P Kruit",
year = "2011",
language = "Undefined/Unknown",
isbn = "nn",
publisher = "nn",
pages = "1--4",
editor = "nn",
booktitle = "Proceedings of the 37th International Conference on Micro and Nano Engineering",
note = "The 37th International Conference on Micro and Nano Engineering ; Conference date: 19-09-2011 Through 23-09-2011",
}