Design and Fabrication of a Miniaturized Gas Ionization Chamber for Production of High Quality Ion Beams

DS Jun, VG Kutchoukov, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the 37th International Conference on Micro and Nano Engineering
    Editors nn
    Place of PublicationBerlin
    Publishernn
    Pages1-4
    Number of pages4
    ISBN (Print)nn
    Publication statusPublished - 2011
    EventThe 37th International Conference on Micro and Nano Engineering - Berlin
    Duration: 19 Sep 201123 Sep 2011

    Publication series

    Name
    Publishernn

    Conference

    ConferenceThe 37th International Conference on Micro and Nano Engineering
    Period19/09/1123/09/11

    Keywords

    • Conf.proc. > 3 pag

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