Design of an Electron Projection System with Slider Lenses and Multiple Beams

D Moonen, LHA Leunissen, PWH de Jager, P Kruit, AJ Bleeker, KD van der Mast

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationProceedings SPIE
    PublisherSPIE
    Pages932-943
    Number of pages12
    ISBN (Print)0-8194-4434-0
    Publication statusPublished - 2002

    Publication series

    Name
    PublisherSPIE
    Name
    Volume4688

    Keywords

    • Conf.proc. > 3 pag

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